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physics.app-ph2019
A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500°C in Air
Savannah R. Benbrook, Caitlin A. Chapin, Ruochen Lu +3
This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO) MEMS resonator array up to 500°C in air.…
physics.app-ph2018
Toward Ka Band Acoustics: Lithium Niobate Asymmetrical Mode Piezoelectric MEMS Resonators
Yansong Yang, Ruochen Lu, Tomas Manzaneque +1
This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40GHz) for fifth-generation (5G) wireless communication. Resonant frequenci…