62 citations · 141 across the 9 of their papers we have counts for
3 papers · 1 filter
The Ferroelectric-Gate Fin Microwave Acoustic Signal Processor
Faysal Hakim, Nicholas Rudawski, Troy Tharpe +1
Wireless communication through dynamic spectrum allocation over microwave bands, essential to accommodate exponentially growing data traffic, requires massive array of radio-freque…
Complementary-Switchable Dual-Mode SHF Scandium-Aluminum Nitride BAW Resonator
Dicheng Mo, Shaurya Dabas, Sushant Rassay +1
This article presents a bulk acoustic wave (BAW) resonator with complementary switchable operation in the first and second thickness extensional modes (TE1 and TE2) at 7.04 and 13.…
Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Micro-Fins
Mehrdad Ramezani, Valeriy Felmetsger, Nicholas Rudawski +1
A fabrication process is developed to grow c-axis textured aluminum nitride (AlN) films on the sidewall of single crystal silicon (Si) micro-fins to realize fin bulk acoustic wave…