2 papers
physics.app-ph2019
Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Micro-Fins
Mehrdad Ramezani, Valeriy Felmetsger, Nicholas Rudawski +1
A fabrication process is developed to grow c-axis textured aluminum nitride (AlN) films on the sidewall of single crystal silicon (Si) micro-fins to realize fin bulk acoustic wave…
cond-mat.mes-hall2019
Atomically Engineered Hf0.5Zr0.5O2 Integrated Nano-Electromechanical Transducers
Mayur Ghatge, Glen Walters, Toshikazu Nishida +1
The monolithic integration of electromechanical transduction at the nanoscale with advanced CMOS is among the most important challenges of semiconductor electronic systems to lever…