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cond-mat.mtrl-sci2026
SC-1 Etching of Niobium and Titanium Nitride Thin Films
Adrián Gutiérrez-Cruz, K. A. C. Rathnathilaka, Jani M. Taskinen +6
Dry etching techniques, ubiquitous in microelectronics fabrication, often result in challenging levels of undesired collateral plasma-induced damage. In this work, we demonstrate a…
cond-mat.mtrl-sci2016★ 101 cited
Conformal Titanium Nitride in a Porous Silicon Matrix: a Nanomaterial for In-Chip Supercapacitors
Kestutis Grigoras, Jari Keskinen, Leif Grönberg +6
Today's supercapacitor energy storages are typically discrete devices aimed for printed boards and power applications. The development of autonomous sensor networks and wearable el…