Showing physics.app-phShow all
2 papers · 1 filter
physics.app-ph2020
HAADF-STEM block-scanning strategy for local measurement of strain at the nanoscale
Viveksharma Prabhakara, Daen Jannis, Giulio Guzzinati +3
Lattice strain measurement of nanoscale semiconductor devices is crucial for the semiconductor industry as strain substantially improves the electrical performance of transistors.…
physics.app-ph2019
Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique
Viveksharma Prabhakara, Daen Jannis, Armand Béché +2
Moiré fringes are used throughout a wide variety of applications in physics and engineering to bring out small variations in an underlying lattice by comparing with another referen…