Photonic Damascene Process for Integrated High-Q Microresonator Based Nonlinear Photonics

Martin H. P. Pfeiffer, Arne Kordts, Victor Brasch +4

High confinement, integrated silicon nitride (SiN) waveguides have recently emerged as attractive platform for on-chip nonlinear optical devices. The fabrication of high-Q SiN micr…