24 citations · 101 across the 6 of their papers we have counts for
6 papers
Vlasov Simulation of Emissive Plasma Sheath with Energy-Dependent Secondary Emission Coefficient and Improved Modeling for Dielectric Charging Effects
Guang-Yu Sun, Shu Zhang, Bao-Hong Guo +2
A one dimensional Vlasov Poisson simulation code is employed to investigate the plasma sheath considering electron induced secondary electron emission (SEE) and backscattering. The…
On the Ohmic-dominant heating mode of capacitively-coupled plasma inverted by boundary electron emission
Shu Zhang, Guang-Yu Sun, Jian Chen +3
Electron emission from the boundary is ubiquitous in capacitively coupled plasma (CCP) and precipitates nonnegligible influences on the discharge properties. Here we present the PI…
On the electron sheath theory and its applications in plasma-surface interaction
Guang-Yu Sun, Zhang Shu, An-Bang Sun +1
The electron sheath is a particular electron-rich sheath with negative net charges where plasma potential is lower than the biased electrode. Here an improved understanding of elec…
Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors
Shu Zhang, Guang-Yu Sun, Volčokas Arnas +2
The influence of charge trap states in the dielectric boundary material on capacitively coupled radio frequency plasma discharge is investigated with theory and Particle in cell/Mo…
Intense boundary emission destroys normal radio-frequency plasma sheath
Guang-Yu Sun, An-Bang Sun, Guan-Jun Zhang
Plasma sheath is the non-neutral space charge region that isolates bulk plasma from boundary. Radio-frequency (RF) sheathes are formed when applying RF voltage to electrodes. Gener…
On the role of secondary electron emission in capacitively coupled radio frequency plasma sheath: a theoretical ground
Guang-Yu Sun, Han-Wei Li, An-Bang Sun +5
We propose a theoretical ground for emissive capacitively coupled radio-frequency plasma sheath under low pressure. The rf sheath is assumed to be collisionless, and oscillates wit…