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physics.app-ph2020
Site-specific plan-view TEM lamella preparation of pristine surfaces with a large field of view
Tobias Meyer, Tobias Westphal, Birte Kressdorf +3
Transmission electron microscopy has become a major characterisation tool with an ever increasing variety of methods being applied in wide range of scientific fields. However, the…
physics.app-ph2019
Plasma Profiling Time-of-Flight Mass Spectrometry for Fast Elemental Analysis of Semiconductor Structures with Depth Resolution in the Nanometer Range
Hendrik Spende, Christoph Margenfeld, Tobias Meyer +6
Plasma profiling time of flight mass spectrometry (PP-TOFMS) has recently gained interest, as it enables the elemental profiling of semiconductor structures with high depth resolut…