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20042023
most citedNanopatterning of Si surfaces by normal incident ion erosion: influence of metal incorporation on surface morphology evolution

48 citations · 121 across the 5 of their papers we have counts for

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cond-mat.mtrl-sci2004★ 46 cited

Multi-Dot Floating-Gates for Nonvolatile Semiconductor Memories - Their Ion Beam Synthesis and Morphology

T. Müller, C. Bonafos, K. -H. Heinig +9

Scalability and performance of current flash memories can be improved substantially by replacing the floating poly-Si gate by a layer of Si dots. This multi-dot layer can be fabric…