5 papers · 1 filter
Electron-Induced Formation of C on Si(100) from Acetylene and Ethylene
Oliver MacLean, Marc Savoie, Damian G. Allis +12
Hydrogen Desorption Lithography on Si(100) demonstrates the ability of the Scanning Tunneling Microscope (STM) to create functional atomic-scale structures and devices. The dehydro…
Towards Atom-by-Atom Fabrication: Mechanosynthetic donation and abstraction
Brandon Blue, Mathieu Morin, Alex Inayeh +55
Enabled by inverted-mode scanning tunneling microscopy (IM-STM) and the use of functionalized molecular tools, we demonstrate positionally-controlled mechanosynthetic addition (don…
Atomically precise mechanosynthesis of carbon structures on hydrogenated Si(100) by inverted-mode STM
Megan Cowie, Chris Deimert, Ryan Groome +44
The ability to build atomically precise structures on surfaces with complete control over both atomic placement and chemical bonding remains a central challenge in nanoscale fabric…
Molecular Tools for Non-Planar Surface Chemistry
Taleana Huff, Brandon Blue, Terry McCallum +30
Scanning probe microscopy (SPM) investigations of on-surface chemistry on passivated silicon have only shown in-plane chemical reactions, and studies on bare silicon are limited in…
Enhancing Interconnect Reliability and Performance by Converting Tantalum to 2D Layered Tantalum Sulfide at Low Temperature
Chun-Li Lo, Massimo Catalano, Ava Khosravi +9
The interconnect half-pitch size will reach ~20 nm in the coming sub-5 nm technology node. Meanwhile, the TaN/Ta (barrier/liner) bilayer stack has to be > 4 nm to ensure acceptable…