42 citations · 96 across the 5 of their papers we have counts for
5 papers
Engineering of Niobium Surfaces Through Accelerated Neutral Atom Beam Technology For Quantum Applications
Soumen Kar, Conan Weiland, Chenyu Zhou +16
A major roadblock to scalable quantum computing is phase decoherence and energy relaxation caused by qubits interacting with defect-related two-level systems (TLS). Native oxides p…
Chemical Mechanical Planarization for Ta-based Superconducting Quantum Devices
Ekta Bhatia, Soumen Kar, Jakub Nalaskowski +9
We report on the development of a chemical mechanical planarization (CMP) process for thick damascene Ta structures with pattern feature sizes down to 100 nm. This CMP process is t…
Microring resonator-coupled photoluminescence from silicon W~centers
A. N. Tait, S. M. Buckley, J. Chiles +6
Defect centers are promising candidates for waveguide-integrated silicon light sources. We demonstrate microresonator- and waveguide-coupled photoluminescence from silicon W~center…
Optimization of photoluminescence from W centers in silicon-on-insulator
Sonia M. Buckley, Alex N. Tait, Galan Moody +7
W centers are trigonal defects generated by self-ion implantation in silicon that exhibit photoluminescence at 1.218 m. We have shown previously that they can be used in wavegui…
Development of transmon qubits solely from optical lithography on 300mm wafers
N. Foroozani, C. Hobbs, C. C. Hung +21
Qubit information processors are increasing in footprint but currently rely on e-beam lithography for patterning the required Josephson junctions (JJs). Advanced optical lithograph…