Miscut dependent surface evolution in the process of N-polar GaN$(000\bar{1})$ growth under N-rich condition

Filip Krzyzewski, Magdalena A. Zaluska-Kotur, Henryk Turski +2

The evolution of surface morphology during the growth of N-polar (000-1) GaN under N-rich condition is studied by kinetic Monte Carlo (kMC) simulations for two substrates miscuts 2…