12 citations · 26 across the 5 of their papers we have counts for
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physics.app-ph2019
The refined EUV mask model
I. A. Makhotkin, M. Wu, V. Soltwisch +2
A refined model of an extreme ultraviolet (EUV) mask stack consisting of the Mo/Si multilayer coated by a Ru protective layer and a TaBN/TaBO absorber layer was developed to facili…
physics.comp-ph2019★ 12 cited
A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence
K. V. Nikolaev, V. Soltwisch, P. Hoenicke +6
Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parame…