12 citations · 26 across the 5 of their papers we have counts for
5 papers
Laser-induced electron dynamics and surface modification in ruthenium thin films
Fedor Akhmetov, Igor Milov, Sergey Semin +7
We performed the experimental and theoretical study of the heating and damaging of ruthenium thin films induced by femtosecond laser irradiation. Results of an optical pump-probe t…
The refined EUV mask model
I. A. Makhotkin, M. Wu, V. Soltwisch +2
A refined model of an extreme ultraviolet (EUV) mask stack consisting of the Mo/Si multilayer coated by a Ru protective layer and a TaBN/TaBO absorber layer was developed to facili…
A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence
K. V. Nikolaev, V. Soltwisch, P. Hoenicke +6
Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parame…
Towards Time-Resolved Atomic Structure Determination by X-Ray Standing Waves at a Free-Electron Laser
Giuseppe Mercurio, Igor A. Makhotkin, Igor Milov +6
We demonstrate the structural sensitivity and accuracy of the standing wave technique at a high repetition rate free-electron laser, FLASH at DESY in Hamburg, by measuring the phot…
Model independent X-ray standing wave analysis of periodic multilayer structures
S. N. Yakunin, I. A. Makhotkin, M. A. Chuev +9
We present a model independent approach for the reconstruction of the atomic concentration profile in a nanoscale layered structure, as measured using the X-ray fluorescence yield…