2 papers
physics.app-ph2019
The refined EUV mask model
I. A. Makhotkin, M. Wu, V. Soltwisch +2
A refined model of an extreme ultraviolet (EUV) mask stack consisting of the Mo/Si multilayer coated by a Ru protective layer and a TaBN/TaBO absorber layer was developed to facili…
cond-mat.mtrl-sci2018
Towards Time-Resolved Atomic Structure Determination by X-Ray Standing Waves at a Free-Electron Laser
Giuseppe Mercurio, Igor A. Makhotkin, Igor Milov +6
We demonstrate the structural sensitivity and accuracy of the standing wave technique at a high repetition rate free-electron laser, FLASH at DESY in Hamburg, by measuring the phot…