most citedUV-laser modification and selective ion-beam etching of amorphous vanadium pentoxide thin films

7 citations · 7 across the 1 of their papers we have counts for

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1 paper

physics.app-ph2020★ 7 cited

UV-laser modification and selective ion-beam etching of amorphous vanadium pentoxide thin films

Alexander Cheremisin, Vadim Putrolaynen, Andrei Velichko +3

We present the results on excimer laser modification and patterning of amorphous vanadium pentoxide films. Wet positive resist-type and Ar ion-beam negative resist-type etching tec…