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20172021
most citedReconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver

39 citations · 152 across the 8 of their papers we have counts for

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Showing 2021Show all

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physics.app-ph2021★ 19 cited

On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Analía Fernández Herrero, Victor Soltwisch, Mika Pflüger +2

Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive m…