39 citations · 152 across the 8 of their papers we have counts for
8 papers
On uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
Analía Fernández Herrero, Victor Soltwisch, Mika Pflüger +2
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive m…
Vacuum-compatible photon-counting hybrid pixel detector for wide-angle X-ray scattering, X-ray diffraction and X-ray reflectometry in the tender X-ray range
D. Skroblin, A. Schavkan, M. Pflüger +3
A vacuum-compatible photon-counting hybrid pixel detector has been installed in the ultra-high vacuum (UHV) reflectometer of the four-crystal monochromator (FCM) beamline of the Ph…
Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…
Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings
Analía Fernández Herrero, Mika Pflüger, Jürgen Probst +2
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexit…
Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with GISAXS
Mika Pflüger, Victor Soltwisch, Jolly Xavier +4
In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic…
Characteristic diffuse scattering from distinct line roughnesses
Analía Fernández Herrero, Mika Pflüger, Frank Scholze +1
Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electr…
Reconstructing Detailed Line Profiles of Lamellar Gratings from GISAXS Patterns with a Maxwell Solver
Victor Soltwisch, Analia Fernandez Herrero, Mika Pflüger +5
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape.…
Grazing Incidence Small Angle X-Ray Scattering (GISAXS) on Small Targets Using Large Beams
Mika Pflüger, Victor Soltwisch, Jürgen Probst +2
GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footpr…