3 papers
cond-mat.mtrl-sci2021
Reducing electron beam damage through alternative STEM scanning strategies. Part I -- Experimental findings
Abner Velazco, Daen Jannis, Armand Béché +1
The highly energetic electrons in a transmission electron microscope (TEM) can alter or even completely destroy the structure of samples before sufficient information can be obtain…
physics.app-ph2020
Evaluation of different rectangular scan strategies for STEM imaging
Abner Velazco, Magnus Nord, Armand Béché +1
STEM imaging is typically performed by raster scanning a focused electron probe over a sample. Here we investigate and compare three different scan patterns, making use of a progra…
physics.app-ph2019
Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique
Viveksharma Prabhakara, Daen Jannis, Armand Béché +2
Moiré fringes are used throughout a wide variety of applications in physics and engineering to bring out small variations in an underlying lattice by comparing with another referen…