22 citations · 26 across the 2 of their papers we have counts for
2 papers
physics.atom-ph2021★ 22 cited
TSV-integrated Surface Electrode Ion Trap for Scalable Quantum Information Processing
P. Zhao, J. -P. Likforman, H. Y. Li +6
In this study, we report the first Cu-filled through silicon via (TSV) integrated ion trap. TSVs are placed directly underneath electrodes as vertical interconnections between ion…
physics.atom-ph2020★ 4 cited
Functional surface ion traps on a 12-inch glass wafer for quantum applications
J Tao, J Likforman, P Zhao +6
We report large-scale fabrication of perfectly functional radio frequency (RF) surface ion traps on a 12-inch glass substrate with a standard CMOS-compatible backend process. Estab…