37 citations · 44 across the 4 of their papers we have counts for
1 paper · 1 filter
Alexander Cheremisin, Vadim Putrolaynen, Andrei Velichko +3
We present the results on excimer laser modification and patterning of amorphous vanadium pentoxide films. Wet positive resist-type and Ar ion-beam negative resist-type etching tec…