86 citations · 148 across the 7 of their papers we have counts for
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Enhanced Permittivity in Wurtzite ScAlN through Nanoscale Sc Clustering
James L Hart, Andrew C Lang, Matthew T Hardy +8
ScN alloyed AlN (ScxAl1-xN, ScAlN) is a wurtzite semiconductor with attractive ferroelectric, dielectric, piezoelectric, and optical properties. Here, we show that ScAlN films (wit…
A comprehensive equivalent circuit model for high overtone bulk acoustic resonators (HBARs)
Vikrant J. Gokhale, Brian P. Downey
This paper presents a new and comprehensive equivalent circuit model for high overtone bulk acoustic resonators (HBARs). HBARs demonstrate several very sharp resonance modes distri…
Strongly dispersive dielectric properties of high-ScN-fraction ScAlN deposited by molecular beam epitaxy
Vikrant J. Gokhale, James G. Champlain, Matthew T. Hardy +9
We present a comprehensive study of dielectric properties including complex permittivity, loss, and leakage of high-ScN-fraction ScAlN thin films grown using molecular beam epitaxy…