54 citations · 124 across the 6 of their papers we have counts for
6 papers
Calibration-based overlay sensing with minimal-footprint targets
Tom A. W. Wolterink, Robin D. Buijs, Giampiero Gerini +2
Overlay measurements are a critical part of modern semiconductor fabrication, but overlay targets have not scaled down in the way devices have. In this work, we produce overlay tar…
Color filter arrays based on dielectric metasurface elements
Jonas Berzins, Fabrizio Silvestri, Giampiero Gerini +3
Digital imaging has been steadily improving over the past decades and we are moving towards a wide use of multi- and hyperspectral cameras. A key component of such imaging systems…
Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference
Jonas Berzinš, Simonas Indrišiūnas, Koen van Erve +8
High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovol…
Nanostructure-modulated planar high spectral resolution spectro-polarimeter
L. Pjotr Stoevelaar, Jonas Berzinš, Fabrizio Silvestri +7
We present a planar spectro-polarimeter based on Fabry-P{é}rot cavities with embedded polarization-sensitive high-index nanostructures. A m-thick spectro-polarimetric system f…
Reflection confocal nanoscopy using a super-oscillatory lens
Arvind Nagarajan, L. Pjotr Stoevelaar, Fabrizio Silvestri +4
A Superoscillatory lens (SOL) is known to produce a sub-diffraction hotspot which is useful for high-resolution imaging. However, high-energy rings called sidelobes coexist with th…
A Broadband Superabsorber at Optical Frequencies: Design and Demonstration
Arvind Nagarajan, Kumar Vivek, Manav Shah +2
Metasurface based super absorbers exhibit near unity absorbance. While the absorption peak can be tuned by the geometry/size of the sub-wavelength resonator, broadband absorption c…