most citedDispersive measurement of a semiconductor double quantum dot via 3D integration of a high-impedance TiN resonator

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physics.app-ph2020

Fabrication process and failure analysis for robust quantum dots in silicon

J. P. Dodson, Nathan Holman, Brandur Thorgrimsson +7

We present an improved fabrication process for overlapping aluminum gate quantum dot devices on Si/SiGe heterostructures that incorporates low-temperature inter-gate oxidation, the…