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cond-mat.mtrl-sci2020
In-situ Nanoscale Characterization of Composition and Structure during Formation of Ultrathin Nickel Silicide
Tuan T. Tran, Christian Lavoie, Zhen Zhang +1
We characterize composition and structure of ultrathin nickel silicide during formation from 3 nm Ni films on Si(100) using in-situ high resolution ion scattering and high resoluti…
cond-mat.mtrl-sci2019
In-situ characterization of ultrathin nickel silicides using 3D medium-energy ion scattering
Tuan Thien Tran, Lukas Jablonka, Christian Lavoie +2
We demonstrate a novel approach for non-destructive in-situ characterization of phase transitions of ultrathin nickel silicide films using 3D medium-energy ion scattering. The tech…