most citedSoft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System

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cond-mat.mtrl-sci2025

Sustainable wafer-scale integration of epitaxial ZnO on silicon for piezoelectric devices

D. Sanchez-Fuentes, R. Desgarceaux, A. Rahal +13

To sustainably support the ongoing energetic transition, we need functional metal oxides capable of converting energy, and produce storage, and sensing devices. However, these mate…