1 citations · 1 across the 1 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2025
Sustainable wafer-scale integration of epitaxial ZnO on silicon for piezoelectric devices
D. Sanchez-Fuentes, R. Desgarceaux, A. Rahal +13
To sustainably support the ongoing energetic transition, we need functional metal oxides capable of converting energy, and produce storage, and sensing devices. However, these mate…
physics.app-ph2020★ 1 cited
Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System
Claire Jolly, Andres Gomez, David Sanchez-Fuentes +9
The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of th…