171 citations · 173 across the 4 of their papers we have counts for
5 papers · 1 filter
Piezoresistive PtSe pressure sensors with reliable high sensitivity and their integration into CMOS ASIC substrates
Sebastian Lukas, Nico Rademacher, Sofía Cruces +14
Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspende…
High-yield large-scale suspended graphene membranes over closed cavities for sensor applications
Sebastian Lukas, Ardeshir Esteki, Nico Rademacher +10
Suspended membranes of monoatomic graphene exhibit great potential for applications in electronic and nanoelectromechanical devices. In this work, a "hot and dry" transfer process…
Button Shear Testing for Adhesion Measurements of 2D Materials
Josef Schätz, Navin Nayi, Jonas Weber +13
Two-dimensional (2D) materials are considered for numerous applications in microelectronics, although several challenges remain when integrating them into functional devices. Weak…
Nanoelectromechanical Sensors based on Suspended 2D Materials
Max C. Lemme, Stefan Wagner, Kangho Lee +9
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last dec…
Gate-tunable graphene-based Hall sensors on flexible substrates with increased sensitivity
Burkay Uzlu, Zhenxing Wang, Sebastian Lukas +3
We demonstrate a novel concept for operating graphene-based Hall sensors using an alternating current (AC) modulated gate voltage, which provides three important advantages compare…