R. Nigro

activity

20202023

most citedAluminum oxide nucleation in the early stages of atomic layer deposition on epitaxial graphene

39 citations · 66 across the 3 of their papers we have counts for

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cond-mat.mtrl-sci2023★ 27 cited

Direct atomic layer deposition of ultra-thin $A l_{2} O_{3}$ and $H f O_{2}$ films on gold-supported monolayer $M o S_{2}$

E. Schilirò, S. E. Panasci, A. M. Mio +9

In this paper, the atomic layer deposition (ALD) of ultra-thin films (<4 nm) of $A l_{2} O_{3}$ and $H f O_{2}$ on Au-supported monolayer (1L) $M o S_{2}$ is investigated, providing an i…

cond-mat.mtrl-sci2020★ 39 cited

Aluminum oxide nucleation in the early stages of atomic layer deposition on epitaxial graphene

E. Schilirò, R. Lo Nigro, S. E. Panasci +5

In this work, the nucleation and growth mechanism of aluminum oxide (Al2O3) in the early stages of the direct atomic layer deposition (ALD) on monolayer epitaxial graphene (EG) on…

Direct atomic layer deposition of ultra-thin Al2​O3​ and HfO2​ films on gold-supported monolayer MoS2​

Aluminum oxide nucleation in the early stages of atomic layer deposition on epitaxial graphene

Direct atomic layer deposition of ultra-thin $A l_{2} O_{3}$ and $H f O_{2}$ films on gold-supported monolayer $M o S_{2}$