Low Temperature Homoepitaxy Of (010) $\beta$-Ga${}_2$O${}_3$ By Metalorganic Vapor Phase Epitaxy : Expanding The Growth Window

Arkka Bhattacharyya, Praneeth Ranga, Saurav Roy +3

In this work, we report on the growth of high-mobility $\beta$-Ga${}_2$O${}_3$ homoepitaxial thin films grown at a temperature much lower than the conventional growth temperature window fo…