615 citations · 1.3k across the 28 of their papers we have counts for
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Nanomechanics of CNTs for Sensor Application
C. Wagner, S. Hartmann, B. Wunderle +3
A nanoscopic simulation for an acceleration sensor is aimed based on the piezoresistive effect of carbon nanotubes (CNTs). Therefore, a compact model is built from density function…
Theoretical investigation of an in situ k-restore process for damaged ultra-low-k materials based on plasma enhanced fragmentation
A. Förster, C. Wagner, S. Gemming +1
We present theoretical investigations of a k-restore process for damaged pourous ultra-low-k (ULK) materials. The process is based on plasma enhanced fragmented silylation precurso…
Theoretical investigation of in situ k-restore processes for damaged ultra-low-k dielectrics
A. Förster, C. Wagner, J. Schuster +1
Ultra-low-k (ULK) materials are essential for today's production of integrated circuits (ICs). However, during the manufacturing process the ULK's low dielectric constant (k-value)…
Ab-initio Study of the Trimethylaluminum Atomic Layer Deposition Process on Carbon Nanotubes - An Alternative Initial Step
A. Förster, C. Wagner, J. Schuster +1
Electronic applications of carbon nanotubes (CNTs) require the deposition of dielectric films on the tubes while conserving their excellent electronic properties. In our density fu…
DFT investigations of the piezoresistive effect of carbon nanotubes for sensor application
C. Wagner, J. Schuster, T. Gessner
We investigate the piezoresistive effect of carbon nanotubes (CNTs) within density functional theory (DFT) aiming at application-relevant CNTs. CNTs are excellent candidates for th…
Influence of defect-induced deformations on electron transport in carbon nanotubes
Fabian Teichert, Christian Wagner, Alexander Croy +1
We theoretically investigate the influence of defect-induced long-range deformations in carbon nanotubes on their electronic transport properties. To this end we perform numerical…