Assessment of the (010) $\beta$-Ga${}_2$O${}_3$ Surface and Substrate Specification

Michael A. Mastro, Charles R. Eddy, Marko J. Tadjer +3

Recent breakthroughs in bulk crystal growth of the thermodynamically stable beta phase of gallium oxide ($\beta$-Ga${}_2$O${}_3$) have led to the commercialization of large-area beta-Ga$_2…