Beyond 5 GHz excitation of a ZnO-based high-overtone bulk acoustic resonator on SiC substrate

Padmalochan Panda, Soumyadip Chatterjee, Siddharth Tallur +1

This work reports on the fabrication and characterization of an Au/ZnO/Pt-based high-overtone bulk acoustic resonator (HBAR) on SiC substrates. We evaluate its microwave characteri…