Low energy Ar${}^{+}$ ion beam induced kinetic roughening of thin Pt films on a Si substrate

P. Karmakar, D. Ghose

A 30 nm Pt thin film evaporated onto a Si wafer was sputtered by 8 keV Ar${}^{+}$ ions at various ion doses. The evolution of the modified sputtered films was monitored by atomic for…