Evidence of potential sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions
arXiv:cond-mat/0204222 · doi:10.1016/S0168-583X(03)01743-9
Abstract
The phenomenon of potential sputtering of ultra-thin Pt films due to impact of 20 keV highly charged (q = 3 - 8) ions has been investigated. The results show enhanced erosion of the Pt film with the increase of potential energy of the Ar projectile.