Near 6 GHz Sezawa Mode Surface Acoustic Wave Resonators using AlScN on SiC

Xingyu Du, Nishant Sharma, Zichen Tang +3

Surface Acoustic Wave (SAW) devices featuring Aluminum Scandium Nitride (AlScN) on a 4H-Silicon Carbide (SiC) substrate, offer a unique blend of high sound velocity, low thermal re…