From the 3 of 6 linked papers with an AI index.
6 papers
Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele +10
The paper investigates how deposition conditions, etching power, and resist‑strip temperature influence the performance of superconducting titanium nitride coplanar waveguide reson…
Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication
Simon J. K. Lang, Ignaz Eisele, Alwin Maiwald +8
The paper studies surface treatment methods for aluminum superconducting resonators to maintain low dielectric loss after a 24‑hour ambient exposure, finding that selective oxide r…
Stability studies on subtractively-fabricated CMOS-compatible superconducting transmon qubits
Chawki Dhieb, Johannes Weber, Samuel Taubenberger +12
Developing fault-tolerant quantum processors with error correction demands large arrays of physical qubits whose key performance metrics (coherence times, control fidelities) must…
CMOS-compatible processing and room-temperature characterization on wafer-level for scalable quantum computing
S. J. K. Lang, T. Mayer, J. Weber +10
We report on an industry-grade CMOS-compatible qubit fabrication approach using a CMOS pilot line, enabling a yield of functional devices reaching 92.8 %, with a resistance spread…
3D-Integrated Superconducting qubits: CMOS-Compatible, Wafer-Scale Processing for Flip-Chip Architectures
T. Mayer, H. Bender, S. J. K. Lang +16
In this article, we present a technology development of a superconducting qubit device 3D-integrated by flip-chip-bonding and processed following CMOS fabrication standards and con…
CMOS-Compatible, Wafer-Scale Processed Superconducting Qubits Exceeding Energy Relaxation Times of 200us
T. Mayer, J. Weber, E. Music +12
We present the results of an industry-grade fabrication of superconducting qubits on 200 mm wafers utilizing CMOS-established processing methods. By automated waferprober resistanc…