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20192025
most citedImproving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry

34 citations · 77 across the 4 of their papers we have counts for

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Showing 2021 · cond-mat.mtrl-sciShow all

1 paper · 2 filters

cond-mat.mtrl-sci2021★ 34 cited

Improving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry

Daniel Drury, Keisuke Yazawa, Allison Mis +3

High-Sc Al1-xScxN thin films are of tremendous interest because of their attractive piezoelectric and ferroelectric properties, but overall film quality and reproducibility are wid…