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cond-mat.mtrl-sci2021
Improving Reproducibility of Sputter Deposited Ferroelectric Wurtzite Al0.6Sc0.4N Films using In-situ Optical Emission Spectrometry
Daniel Drury, Keisuke Yazawa, Allison Mis +3
High-Sc Al1-xScxN thin films are of tremendous interest because of their attractive piezoelectric and ferroelectric properties, but overall film quality and reproducibility are wid…
cond-mat.mtrl-sci2019
COMBIgor: data analysis package for combinatorial materials science
Kevin R. Talley, Sage R. Bauers, Celeste L. Melamed +9
Combinatorial experiments involve synthesis of sample libraries with lateral composition gradients requiring spatially-resolved characterization of structure and properties. Due to…