28 citations · 141 across the 14 of their papers we have counts for
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Patrick Harvey-Collard, Abdelatif Jaouad, Dominique Drouin +1
Inductively Coupled Plasma (ICP) etching of amorphous silicon (a-Si) nanostructures using a continuous C4F8/SF6 plasma over nanotopography in silicon dioxide (SiO2) is investigated…