most citedCombined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots

16 citations · 16 across the 1 of their papers we have counts for

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cond-mat.mes-hall2003★ 16 cited

Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots

M. C. Rogge, C. Fuehner, U. F. Keyser +4

We have combined direct nanofabrication by local anodic oxidation with conventional electron-beam lithography to produce a parallel double quantum dot based on a GaAs/AlGaAs hetero…