5 papers
Enhancement-Mode Vertical -GaO U-Trench MOSFET with MOCVD Regrown n Contact Layers and Nitrogen-Implanted Current Blocking Layer
Walid Amir, Jiawei Liu, Surajit Chakraborty +4
In this work, an implantation-free ohmic contact technology based on selectively MOCVD-regrown Si-doped n layers is demonstrated for enhancement-mode vertical -GaO U…
Electrical and Structural Properties of In-Situ MOCVD Grown AlO/-GaO and AlO/-(AlGa)O MOSCAPs
A F M Anhar Uddin Bhuiyan, Lingyu Meng, Dong Su Yu +6
This study investigates the electrical and structural properties of MOSCAPs with in-situ MOCVD-grown AlO dielectrics on (010) -GaO and -(AlGa)$_…
Metalorganic Chemical Vapor Deposition of \b{eta}-(AlxGa1-x)2O3 thin films on (001) \b{eta}-Ga2O3 substrates
A. F. M. Anhar Uddin Bhuiyan, Lingyu Meng, Hsien-Lien Huang +5
Phase pure \b{eta}-(AlxGa1-x)2O3 thin films are grown on (001) oriented \b{eta}-Ga2O3 substrates via metalorganic chemical vapor deposition (MOCVD). By systematically tuning the pr…
In-situ MOCVD Growth and Band Offsets of AlO Dielectric on -GaO and -(AlGa)O thin films
A F M Anhar Uddin Bhuiyan, Lingyu Meng, Hsien-Lien Huang +2
The in-situ metalorganic chemical vapor deposition (MOCVD) growth of AlO dielectrics on -GaO and -(AlGa)O films is investigated as a fun…
MOCVD growth and band offsets of \k{appa}-phase Ga2O3 on sapphire, GaN, AlN and YSZ substrates
A F M Anhar Uddin Bhuiyan, Zixuan Feng, Hsien-Lien Huang +3
Epitaxial growth of \k{appa}-phase Ga2O3 thin films are investigated on c-plane sapphire, GaN- and AlNon-sapphire, and (100) oriented yttria stabilized zirconia (YSZ) substrates vi…