27 citations · 28 across the 2 of their papers we have counts for
2 papers
quant-ph2023★ 1 cited
Characterization of superconducting through-silicon vias as capacitive elements in quantum circuits
Thomas M. Hazard, Wayne Woods, Danna Rosenberg +13
The large physical size of superconducting qubits and their associated on-chip control structures presents a practical challenge towards building a large-scale quantum computer. In…
cond-mat.supr-con2023★ 27 cited
Progress toward superconductor electronics fabrication process with planarized NbN and NbN/Nb layers
Sergey K. Tolpygo, Justin L. Mallek, Vladimir Bolkhovsky +5
To increase density of superconductor digital and neuromorphic circuits by 10x and reach integration scale of Josephson junctions (JJs) per chip, we developed a new fabricat…