Showing cs.CVShow all
2 papers · 1 filter
cs.CV2025
SEM-CLIP: Precise Few-Shot Learning for Nanoscale Defect Detection in Scanning Electron Microscope Image
Qian Jin, Yuqi Jiang, Xudong Lu +5
In the field of integrated circuit manufacturing, the detection and classification of nanoscale wafer defects are critical for subsequent root cause analysis and yield enhancement.…
cs.CV2025
FabGPT: An Efficient Large Multimodal Model for Complex Wafer Defect Knowledge Queries
Yuqi Jiang, Xudong Lu, Qian Jin +3
Intelligence is key to advancing integrated circuit (IC) fabrication. Recent breakthroughs in Large Multimodal Models (LMMs) have unlocked extraditionary abilities in understanding…