activity
20172026
most citedEffect of oxygen plasma on nanomechanical silicon nitride resonators

30 citations · 73 across the 5 of their papers we have counts for

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6 papers · 1 filter

physics.app-ph2026

Reduction of intrinsic losses in nanomechanical silicon nitride resonators through thermal treatment in ultrahigh vacuum

Nicola Cavalleri, Ariane Giesriegl, Robert G. West +7

Since the discovery of dissipation dilution, silicon nitride (SiN) nanomechanical resonators have set the benchmark for ultracoherent mechanical systems, with geometry and strain e…

physics.app-ph2020★ 17 cited

Thermal transport and frequency response of localized modes on low-stress nanomechanical silicon nitride drums featuring a phononic bandgap structure

Pedram Sadeghi, Manuel Tanzer, Niklas Luhmann +3

Development of broadband thermal sensors for the detection of, among others, radiation, single nanoparticles, or single molecules is of great interest. In recent years, phototherma…

physics.app-ph2020★ 25 cited

Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators

Markus Piller, Pedram Sadeghi, Robert G. West +4

Nanomechanical silicon nitride (SiN) drum resonators are currently employed in various fields of applications that arise from their unprecedented frequency response to physical qua…

physics.app-ph2020★ 1 cited

A nanoelectromechanical position-sensitive detector with picometer resolution

Miao-Hsuan Chien, Johannes Steurer, Pedram Sadeghi +2

Sub-nanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the det…

physics.app-ph2019

Spectrally Broadband Electro-Optic Modulation with Nanoelectromechanical String Resonators

Nicolas Cazier, Pedram Sadeghi, Miao-Hsuan Chien +2

In this paper, we present an electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically con…

physics.app-ph2019

Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators

Pedram Sadeghi, Manuel Tanzer, Simon L. Christensen +1

Nanomechanical resonators based on strained silicon nitride (SiN) have received a large amount of attention in fields such as sensing and quantum optomechanics due to their…