35 citations · 47 across the 2 of their papers we have counts for
3 papers · 1 filter
Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask
D. Virganavičius, V. J. Cadarso, R. Kirchner +4
Patterning of diamond-like carbon (DLC) and DLC:metal nanocomposites is of interest for an increasing number of applications. We demonstrate a nanoimprint lithography process based…
Hot embossing of Au- and Pb- based alloys for X ray grating fabrication
Lucia Romano, Joan Vila-Comamala, Helmut Schift +1
Grating-based X-ray phase-contrast interferometry has a high application impact in material science and medicine for imaging of weakly absorbing (low Z) materials and soft tissues.…
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Lucia Romano, Joan Vila-Comamala, Matias Kagias +4
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technolo…