35 citations · 64 across the 4 of their papers we have counts for
4 papers
Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask
D. Virganavičius, V. J. Cadarso, R. Kirchner +4
Patterning of diamond-like carbon (DLC) and DLC:metal nanocomposites is of interest for an increasing number of applications. We demonstrate a nanoimprint lithography process based…
Hot embossing of Au- and Pb- based alloys for X ray grating fabrication
Lucia Romano, Joan Vila-Comamala, Helmut Schift +1
Grating-based X-ray phase-contrast interferometry has a high application impact in material science and medicine for imaging of weakly absorbing (low Z) materials and soft tissues.…
Lithographic performance of ZEP520A and mr-PosEBR resists exposed by electron beam and extreme ultraviolet lithography
Roberto Fallica, Dimitrios Kazazis, Robert Kirchner +4
Pattern transfer by deep anisotropic etch is a well-established technique for fabrication of nanoscale devices and structures. For this technique to be effective, the resist materi…
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Lucia Romano, Joan Vila-Comamala, Matias Kagias +4
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technolo…