35 citations · 47 across the 2 of their papers we have counts for
2 papers
physics.app-ph2019★ 12 cited
Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask
D. Virganavičius, V. J. Cadarso, R. Kirchner +4
Patterning of diamond-like carbon (DLC) and DLC:metal nanocomposites is of interest for an increasing number of applications. We demonstrate a nanoimprint lithography process based…
physics.app-ph2017★ 35 cited
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Lucia Romano, Joan Vila-Comamala, Matias Kagias +4
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technolo…