47 citations · 85 across the 3 of their papers we have counts for
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High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching
Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala +6
Despite the fact that the resolution of conventional contact/proximity lithography can reach feature sizes down to ~0.5-0.6 micrometers, the accurate control of the linewidth and u…
Hot embossing of Au- and Pb- based alloys for X ray grating fabrication
Lucia Romano, Joan Vila-Comamala, Helmut Schift +1
Grating-based X-ray phase-contrast interferometry has a high application impact in material science and medicine for imaging of weakly absorbing (low Z) materials and soft tissues.…
Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium
Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko +3
X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diag…
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Lucia Romano, Joan Vila-Comamala, Matias Kagias +4
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technolo…
Effect of Isopropanol on Gold Assisted Chemical Etching of Silicon Microstructures
Lucia Romano, Joan Vila-Comamalab, Konstantins Jefimovs +1
Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In…