Scanning Microwave Microscopy of Aluminum CMOS Interconnect Lines Buried in Oxide and Water

Xin Jin, Kuanchen Xiong, Roderick Marstell +6

Using a scanning microwave microscope, we imaged in water aluminum interconnect lines buried in aluminum and silicon oxides fabricated through a state-of-the-art 0.13 um SiGe BiCMO…