18 citations · 103 across the 14 of their papers we have counts for
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physics.chem-ph2017★ 2 cited
Theoretical investigation of in situ k-restore processes for damaged ultra-low-k dielectrics
A. Förster, C. Wagner, J. Schuster +1
Ultra-low-k (ULK) materials are essential for today's production of integrated circuits (ICs). However, during the manufacturing process the ULK's low dielectric constant (k-value)…
physics.chem-ph2011
Decomposition of formic acid
Martin Schmeißer, Jörg Schuster
Formic acid is known to act as a reduction agent for copper oxide. Its thermal uni-molecular decomposition was studied by means of DFT with special attention to reaction paths and…