130 citations · 444 across the 12 of their papers we have counts for
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physics.optics2022★ 8 cited
Phase mask pinholes as spatial filters for laser interference lithography
Giovanna Capraro, Maxim Lipkin, Michael Möller +2
Laser resonators have outputs with Gaussian spatial beam profiles. In laser interference lithography (LIL), using such Gaussian shaped beams leads to an inhomogeneous exposure of t…
physics.app-ph2022★ 22 cited
AFM-based Hamaker Constant Determination with Blind Tip Reconstruction
Benny Ku, Ferdinandus van de Wetering, Jens Bolten +3
Particle contamination of extreme ultraviolet (EUV) photomasks is one of the numerous challenges in nanoscale semiconductor fabrication, since it can lead to systematic device fail…